Research Experience:

• August 2013 - present School of Microelectronics, and Department of EEE, SUSTech

  Associate Professor (Principal investigator, Supported by SUSTech start package and other grants, ~20 million RMB)

  Project: Multi-source energy harvesting technology for wireless sensor networks

• July 2010 - June 2013 Department of Micro- and Nanotechnology, DTU

  Assistant Professor (Principal investigator, Supported by FTP, 3.9 million dkk)

  Project: Energy harvesting device with polymer electret for wireless electronic devices

  The main objective of this project is to develop a small-size energy harvesting device which is compatible with mass-production of wireless sensor networks. During this project, we have developed a few types of energy harvesting devices based on the electrostatic methods. Maximum power output up to ~10 µW can be harvested from vibration sources with low frequency and low amplitude.

• Aug. 2008 - June 2010 Department of Micro- and Nanotechnology, DTU

  Postdoctoral Researcher (Host professor: Ole Hansen, HTF-Højteknologifonden, 18 million dkk)

  Project: Micro Sheet Resistance Probing (µRSP) with four-point probes

  The primary goal is to develop a novel metrology tool based on advanced MEMS technology, for characterization of e.g. ultra shallow junctions (USJ) in the semiconductor industry. Within this project, I have published 11 publications in peer-reviewed journals and international conferences. One WIPO patent is also granted for a faster and more accurate Hall Effect measurement method.

• Sept. 2003 - July 2008 State Key Laboratory of Transducer Technology, SIMIT, CAS

  Research Assistant (Supervisor: Prof. Xinxin Li, supported by the NSFC and Chinese 973 program)

  Wafer-level IC testing is of great importance for the semiconductor industry, and the conventional testing probe cards will not be suitable for the next generation IC due to a lot of limitations. The objective of this Ph.D. program was to develop new probe cards with smaller probe pitch at cheaper cost based on MEMS technology. During this 5 years Ph.D. program, I had developed 4 different types of MEMS probe cards for various applications. Several new MEMS fabrication processes such as through-wafer electroplating and spray-coating photo-resist were also developed and are still widely used in the laboratory. Within this project, I had totally published 13 peer-reviewed papers in the first-level journals and conferences such as J-MEMS, JMM, IEEE IEDM, IEEE MEMS, and Transducers. Additionally, 2 Chinese patents are granted.

• Sept. 2002 - July 2003 Laboratory of Intelligent Micro-System, USTC

  Research Assistant (Advisor: Prof. Wenhao Huang)

  Modeling and Simulation for Optical Driven Micro-Propeller Shaped Rotor

Teaching, Supervision and Management experience:

• 2013-now, supervisor for 6 master students and 7 Ph.D students; mentor for more than 20 undergraduate students in ShuRen College
• 2013-now, EE202 (Digital Circuit), EE305(Introduction to VLSI Technology), EE306 (Introduction to MEMS),EE415 (Advances in Micro Energy and Micro Systems)
• 2013, teaching “33250 Semiconductor Technology” (5 ECTS) in DTU Nanotech and a Ph. D course “Sustainable wireless sensor networks” in Aalborg University.
• 2013, UDTU course, level 4.
• 2012, supervisor for two master students and one bachelor student.
• 2012, supervisor for two bachelor students for 3-weeks course 33470: Micro-3W and Grøn Dyst.
• 2012, UDTU course, level 2 & 3.
• 2011, supervisor for two bachelor students with their 34029 Fagprojekt (10 ECTS points).
• 2011, supervisor for two bachelor students’ project (20 ECTS points).
• 2011, project supervisor for two students in 3-weeks course 33470: Micro-3W.
• 2010, UDTU course: level 1.
• 2009, project supervisor for three students in the advanced course 33355: Micro-2
• 2004-2008, co-founder and coordinator for MEMS saloon in SIMIT.

Funding:

1. 2022, PI, Shenzhen Fundamental Research Project (Key Program), 2 Million RMB. (Project No.: JCYJ20220818100415033). 深圳市基础研究（重点项目），“高效能量收集技术机理研究”，200万元（2022-10-28至2025-10-31）
2. 2022, PI, National Natural Science Foundation of China (NSFC): “The principle and application of self-healable vibration energy harvester for harsh industry environment”, 580,000 RMB (Project No.: 62174077) (国家自然科学基金, “面向工业极端环境具有自修复功能的振动能量采集器机理及应用研究”, 国家自然科学基金委员会, 58万元，2022-01-01 至 2025-12-31)
3. 2021, PI, 深圳市卓汉材料技术有限公司，200万元（2021-10-01至2023-09-30）
4. 2021，PI, Nanshan District Special Program, 886,700 RMB, (深圳市南山区5G前沿技术专项建设，“面向生物信息感知的智能传感系统集成”，南山区科技创新局，2021-09-24至2022-09-30)
5. 2021, PI, Nanshan District Special Program, 266,000 RMB, (深圳市南山区5G前沿技术专项建设，“面向5G智能终端的超低频振动能量采集技术研究”，南山区科技创新局，2021-09-24至2022-09-30)
6. 2020，PI，国家重点研发计划（课题负责人），“硅基气体敏感薄膜兼容制造及产业化平台关键技术研究”（课题：晶圆级封装与测试技术，Grant No. 2020YFB2008604），257万元（2020-10-01至2023-09-30）。
7. 2020, PI, Shenzhen Fundamental Research Project, 2.5 Million RMB. (Project No.: JCYJ20200109105838951). 深圳市基础研究（重点项目），“超低频振动能量采集技术研究”，250万元（2020-11-05至2023-11-04）。
8. 2020, PI, 深圳市韶音科技有限公司，10万元。
9. 2019, PI, Nanshan District Special Program, 1.5 Million, (深圳市南山区5G前沿技术专项建设，“基于第三代半导体GaN 材料的MEMS 环境监测传感器”，南山区科技创新局，2019-12-01至2020-12-01)
10. 2018，PI，Guangdong Science and Technology Program for International Collaboration, 0.5 Million RMB. (Project No.: 2018A050506001) (广东省省级科技计划项目，“微型振动能量采集系统及其动力学分析”，广东省科学技术厅，2018-12-01 至 2020-12-01)
11. 2018，PI，深圳市力策科技有限公司，表面声波（SAW）高频信号滤波器的开发，7万元。
12. 2017，PI，深圳市力策科技有限公司，微型光调制器技术开发，7万元。
13. 2017, PI, Shenzhen Fundamental Research Project, 2 Million RMB. (Project No.: JCYJ20170412154426330). (深圳市知识创新计划基础研究学科布局项目，“基于二维材料敏感薄膜的微机电系统气体传感器技术研究”，深圳市科技创新委员会，2017-07-01至2020-06-30).
14. 2016, PI, Open Project from State Key Laboratories of Transducer Technology, 0.25 Million RMB. (Project No.: SKT1606). (传感技术联合国家重点实验室基金，“应用于MEMS器件的驻极体材料研究”，2016年12月-2019年12月).
15. 2016, PI, Guangdong Natural Science Funds for Distinguished Young Scholar, 1 Million RMB. (Project No.: 2016A030306042). (广东省自然科学基金杰出青年项目, “高效复合能量采集技术” , 广东省科学技术厅, 2016-06-01至2020-06-01).
16. 2016, PI, Guangdong Special Support Program for High-level Talents, 0.3 Million RMB. (“广东特支计划”科技青年拔尖人才, 广东省科学技术厅, 2016-07-01至2019-06-30, 2015TQ01X555)
17. 2016, PI, National Natural Science Foundation of China (NSFC): “Micro electrostatic energy harvester with broad bandwidth for wireless sensor networks”, 249,000 RMB (Project No.: 51505209) (国家自然科学基金, “应用于无线传感网络的宽带静电式微型能量采集器研究”, 国家自然科学基金委员会, 2016-01-01 至 2018-12-31，已顺利结题)
18. 2015, co-PI, Shenzhen Fundamental Research Project, overall 3 Million RMB, with a share of 0.9 Million RMB. (Project No.: JCYJ20150827165024088). (深圳市知识创新计划基础研究项目，“基于微机电系统（MEMS）的多级震动耦合能量收集技术研究”，深圳市科技创新委员会，2016-01-01 至 2018-12-31)
19. 2015, co-PI, Shenzhen Fundamental Research Project, overall 3 Million RMB, with a share of 1 Million RMB. (Project No.: JCYJ20150930160634263). (深圳市知识创新计划基础研究项目，“重金属检测用高灵敏光电微纳传感器研究”，深圳市科技创新委员会，2016-01-01 至 2018-12-31)
20. 2015, co-PI, Shenzhen Peacock Group Plan, overall 20 Million RMB. (Project No.: KQTD2015071710313656) (深圳市海外高层次人才创新创业计划，“超宽频谱超强太赫兹波研发团队”，深圳市科技创新委员会，2016-12-01 至 2020-11-30)
21. 21. 2015, PI, Guangdong Natural Science Foundation: “MEMS based electrostatic energy harvesting device”, 100,000 RMB (Project No.: 2015A030313812) (广东省自然科学基金, “基于微机电系统的静电式能量采集器”, 广东省科学技术厅, 2015-08-01 至 2018-08-01，已顺利结题).
22. 22. 2015, PI, Scientific Research Foundation for the Returned Overseas Chinese Scholars, State Education Ministry. 35, 000 RMB. (教育部留学回国人员科研启动基金资助项目, “应用于微型能量采集器的驻极体材料性能研究”, 教育部)
23. 23. 2014, PI, Shenzhen Fundamental Research Project: “Key technologies of electret materials for wireless sensor networks”, 290,000 RMB (Project No.: JCYJ20140417105742703). (深圳市知识创新计划基础研究项目，“应用于无线传感网络的驻极体材料关键技术研究”，深圳市科技创新委员会，2014-08-18至2016-08-31，已顺利结题)
24. 2014, co-PI, Shenzhen key laboratory: “Shenzhen Key Laboratory of 3rd Generation Semiconductor Devices”, overall 3 Million RMB, with a share of 0.6 Million RMB. (Project No.: ZDSYS20140509142721434) (深圳市创新环境建设计划重点实验室项目，“深圳市第三代半导体器件重点实验室”，深圳市科技创新委员会，2014-08-18 至 2016-08-31，已顺利结题)
25. 25. 2014, PI, start-up research grant for new faculty in SUSTech, 5.98 Million RMB. (南方科技大学引进学术人才科研启动经费, “面向无线传感网络应用的能源采集器研究”, 2014-01-01至2018-12-31)
26. 2013, Conference stipend, Otto Mønsted Fond, Hellerup, Denmark, 8,000 DKK.
27. 2012, Conference stipend, Otto Mønsted Fond, Hellerup, Denmark, 5,000 DKK.
28. 2011, Conference stipend, Otto Mønsted Fond, Hellerup, Denmark, 7,990 DKK.
29. 2010, Co-Applicant with Dr. Ming Shen as PI, Project funding: "Microwatt Radio for Self-Sustaining Wireless Sensor Networks". Danish Research Council for Technology and Production (FTP), Denmark. (Project No. 10-093783)
30. 30. 2010, PI, Project funding: "Energy harvesting device with polymer electret for wireless electronic devices". Danish Research Council for Technology and Production (FTP), Denmark, 3,866,400 DKK. (Project No. 10-080864)
31. 2009, Conference stipend, Otto Mønsted Fond, Hellerup, Denmark, 6,945 DKK.

Honors and Awards:

• 2023，国家级一流本科课程负责人
• 2021，中国工程前沿杰出青年学者（中国工程院办公厅）
• 2021，南方科技大学“年度青年教授奖”
• 2020，广东省2020年度一流本科课程负责人
• 2020，第九届广东省教育教学成果奖，二等奖（排名第二）
• 2018，深圳市“青年科技奖”(全市每年4名高校，4名企业获奖者)
• 2018，深圳市“先进教育工作者”荣誉称号
• 2017-, 深圳市龙华区“龙舞华章计划”A类人才
• 2016-, 深圳市南山区“领航人才”
• 2016, 2017年，南方科技大学“优秀书院导师”荣誉称号
• 2016, 2017年，南方科技大学“青年科研奖”
• 2016年，获得广东省第三届高校青年教师教学大赛三等奖
• 2016年，南方科技大学“杰出教学”奖 (建校第1位获得者)
• 2016年，南方科技大学第一届青年教师教学竞赛理论课组一等奖
• 2016, Guangdong Special Support Program for High-level Talents. (“广东特支计划”科技青年拔尖人才)
• 2015年，获得深圳市第三届教育教学科研优秀成果奖二等奖
• 2013, Shenzhen “Overseas High-Caliber Personnel Award” (Peacock Plan, B-Class). (深圳市海外高层次人才“孔雀计划”B类人才)
• 2008, CAS Zhu Li Yuehua Scholarship of Outstanding Doctoral Award (Top 240 out of 4,488 Ph.D. students graduated from CAS in 2008), 5,000 RMB. (中国科学院“朱李月华”优秀博士生奖)
• 2008, SIMIT Presidential Scholarship, Grade 2. (中国科学院上海微系统与信息技术研究所，所长奖学金)
• 2007, Best Student Paper (1st of 450 papers) in 9th Annual Domestic Conference of China Society of Micro-Nano Technology, Shanghai, 2,000 RMB. (第九届中国微米纳米技术学会国内年会一等奖)
• 2005-2006, 2006-2007, CAS “Straight A Student” (twice). (中国科学院三好学生)
• 1999-2002, USTC Outstanding Student Scholarship, Golden Scholarship (twice as Rank 2 among 89 students), Silver Scholarship (once as Rank 4 among 89 students), totally 5,000 RMB. (中国科学技术大学优秀学生奖学金)

Affiliation and Scientific service:

• Editorial Board of Micromachines (SCI Journal)
• Institute of Electrical and Electronics Engineers (IEEE), Senior Member (2012-)
• Grant reviewer for A*STAR Agency for Science & Technology, the National Science Foundation of China, and the Shenzhen Science and Technology Innovation Committee.
• Plenary Chair for 2014 IEEE International Conference on Consumer Electronics − China.
• International Organizing Committee for International Conference on Small Science (ICSS, 2014-2016)
• Session Chair, for IEEE NEMS 2015 conference
• Session Chair, and Program Committee Member for International Conference on Manipulation, Manu­facturing and Measurement on the Nanoscale (3M-NANO, 2014-2018)
• Technical Program Committee Member for the 6th International Multidisciplinary Conference on optofluidics (Optofluidics 2016)
• Session Chair, for the International Multidisciplinary Conference on Optofluidics (IMCO 2017, 2018)
• Organizing Co-chair, for the International Multidisciplinary Conference on Optofluidics (IMCO 2019)
• Technical Program Committee Member, and Session Chair for the International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2018)
• General Chair for the 1st International conference on vibration and energy harvesting application (VEH 2018), Nov. 2-4, Shenzhen, China.
• Technical Program Committee Member, Awards Committee Chair for the 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2019, Poland.)
• Technical Program Committee Member for the International Conference on Solid-State Sensors, Actuators and Microsystems (TPC since Transducers 2017, ETPC since Transducers 2021)
• Technical Program Committee Member for the IEEE International Conference on Micro Electro Mechanical Systems (ETPC since IEEE MEMS 2022)
• 中国医疗保健国际交流促进会健康大数据和数字化医疗分会委员(2017-present)
• 中国微米纳米技术学会微纳执行器与微系统分会委员(2018-present)

Reviewer for:

• 固体力学学报
• 光谱学与光谱分析
• ACS Applied Materials & Interfaces
• ACS Applied Nano Materials
• Advanced Materials Interfaces
• Applied Energy
• Applied Mathematical Modelling
• Applied Organometallic Chemistry
• Applied Physics Letters
• Beilstein Journal of Nanotechnology
• Carbon
• Chemical Engineering Journal
• Colloids and Surfaces A: Physicochemical and Engineering Aspects
• ECS Solid State Letters
• IEEE Access
• IEEE Electron Device Letters
• IEEE Journal of Microelectromechanical Systems
• IEEE Potentials
• IEEE Sensors Letters
• IEEE Sensors Journal
• IEEE/ASME Transactions on Mechatronics
• IET Nanobiotechnology
• Inorganic Chemistry Frontiers
• International Journal of Precision Engineering and Manufacturing-Green Technology
• Journal of Electroanalytical Chemistry
• Journal of Intelligent Material Systems and Structures
• Journal of Micromechanics and Microengineering
• Journal of Physics: Condensed Matter
• Journal of the Taiwan Institute of Chemical Engineers
• Macromolecular Materials and Engineering
• Materials Research Bulletin
• Measurement Science and Technology
• Mechatronics
• Microelectronics Engineering
• Microsystem Technologies
• NANO
• Nano Energy
• Nano Today
• Nature Communications
• Optics Letters
• Science and Technology of Advanced Materials
• Sensors
• Sensors & Actuators: A. Physical
• Sensors & Actuators: B. Chemical
• Small
• Smart Materials and Structures
• Synthetic Metals
• The Scientific World Journal